| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance a transfer efficiency of a horizontal transfer register at the time of a small signal in a CCD solid imaging device. Ž<P>SOLUTION: The solid imaging device includes a plurality of photoreception sensor parts, and a plurality of vertical transfer registers having a vertical transfer channel area and a plurality of vertical transfer electrodes. The solid imaging device has further a thin channel part formed in a transfer-directional prestage portion within the channel area corresponding to a lower side of the same vertical transfer electrode in the transfer channel area, to be sandwiched by both-side impurity concentration modulating areas in both sides. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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