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发明名称
Resist composition and patterning process
摘要
申请公布号
EP1096317(B1)
申请公布日期
2010.09.08
申请号
EP20000309391
申请日期
2000.10.25
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
KINSHO, TAKESHI;NISHI, TSUNEHIRO;HASEGAWA, KOJI;WATANABE, TAKERU;HATAKEYAMA, JUN
分类号
H01L21/027;G03F7/039;C08F32/08;G03F7/004
主分类号
H01L21/027
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