| 摘要 |
A magnetic sensor (10) includes GMR elements (11-18), and heating coils (21-24) serving as heat generating elements. The elements (11-14) and (15-18) are bridge-interconnected to constitute X-axis and Y-axis sensors, respectively. The magnetoresistive elements are formed on an upper surface of a layer (53) superposed on a substrate (20). The heating coils (21, 22, 23, and 24) are disposed adjacent to the elements (11 and 12), the elements (13 and 14), the elements (15 and 16), and the elements (17 and 18), respectively. The heating coils (21-24), when electrically energized, heat mainly the adjacent elements in order to obtain data regarding temperature characteristic of the magnetic sensor. The entire magnetic sensor including the substrate is not heated to the same temperature; and the plurality of magnetoresistive elements are heated to approximately the same temperature. |
