| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect angular velocities in a plurality of axial directions with one inertial force sensor while preventing false detection due to shocks and vibrations applied from the outside. <P>SOLUTION: This inertial force sensor includes: an inertial force detecting element 1 provided with weight sections 7, a connecting section composed of first arms 2 and second arms 3 which have flexibility, support the weight sections 7, and are formed in the same plane, a frame body 6 for holding the weight sections 7 through the connecting section, and sensing electrodes 10 for detecting angular velocities around at least two axes of rotation different in direction; supporting bodies 12 which have flexibility, support the inertial force detecting element 1 and have a board-like shape; and a housing body 11 for housing the inertial force detecting element 1 through the supporting bodies 12. The supporting bodies 12 have bending section 13 in the thickness direction. <P>COPYRIGHT: (C)2010,JPO&INPIT |
