Apparatus, Method and Simulation Objects for Simulation of the Image Formation in a Transmission Electron Microscope

摘要

An apparatus and a method for simulating the behaviour of a TEM based on the first-order Born approximation, the method including the following steps:—providing at least one mathematical model of a virtual specimen;—simulating the image formation in the TEM when imaging the specimen, the simulation being based on a model for image formation which fully accounts for the wave nature of the electrons within the realm of the first order Born approximation and one model for the imaging properties of the TEM instrument. This is particularly suitable for use in solving the structure determination problem in ET.