| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method allowing a mark for positioning to be reliably identified, and allowing the coordinate position of the mark to be correctly and easily determined, in a probe of a wafer. <P>SOLUTION: In an electrical test device of a wafer, a light source 46 is incorporated in a laminate of a ceramic substrate 36 and a sheet-like substrate 38 facing an inspection stage, and a mark member 44 for making a portion of light of the light source 46 pass therethrough is installed on the facing surface of the laminate. A mark 48 is arranged at the center part of the mark member 44. <P>COPYRIGHT: (C)2010,JPO&INPIT |
