| 摘要 |
<p>PURPOSE: A substrate transferring apparatus is provided to transfer substrates of different thicknesses by adjusting a gap between a lower rolling member wiper and a rolling member. CONSTITUTION: A substrate transferring apparatus comprises a base(1), a driving source(3), a lower shaft(5), an upper shaft(7), a lower rolling member(9), and an upper rolling member(11). The driving source generates driving force. The lower shaft is arranged in a base. The lower shaft rotates by a drive source. The upper shaft is placed on the top of the lower shaft. The upper shaft rotates with the lower shaft. The lower rolling member is coupled with the lower shaft.</p> |
