| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a cooling device allowing a drawing device to accurately draw a desired pattern. <P>SOLUTION: The cooling device 1 configured to supply cooling water W (coolant) to a drawing device 50 for irradiating a substrate P in a state housed in a cabinet 51 with a drawing beam outputted from a beam output part 52 to cool the beam output part 52 includes: a cooler 3 comprising an evaporator in a refrigeration cycle 2, and structured to introduce the cooling water W therein for cooling the cooling water W; a pump 6 for pumping the cooling water W cooled by the cooler 3 toward the drawing device 50; an air-conditioning part 4 structured to respectively introduce a portion of the cooling water W pumped by the pump 6 and air A therein to cool the air A by the cooling water W; and a fan 8 for pumping the air A cooled by the air-conditioning part 4 toward the inside of the cabinet 51. <P>COPYRIGHT: (C)2010,JPO&INPIT |
