ASSEMBLY APPARATUS OF ELECTROSTATIC VERTICAL MICRO ACTUATOR USING MEMS ACTUATOR, ELECTROSTATIC VERTICAL MICRO ACTUATOR HAVING THE SAME AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: An assembly device of an electrostatic vertical micro actuator using an MEMS actuator, an electrostatic vertical micro actuator therewith, and a manufacturing method thereof are provided to continuously change the angle of a torsion bar by moving and deforming a torsion bar connecting beam. CONSTITUTION: An assembly device of an electrostatic vertical micro actuator using an MEMS actuator comprises a Micro Electro Mechanical System actuator(210), a torsion bar connecting beam(240), and a connection unit(220). The torsion bar connecting beam is connected to one side of a torsion bar(140) of a micro actuator. The connection unit has an actuator connector and a beam connector. The actuator connector is connected to the MEMS actuator. The beam connector is connected to the torsion bar connecting beam and is coupled to the actuator connector.