发明名称 |
POLISHING PAD MANUFACTURING DEVICE AND MANUFACTURING PROCESS USING IT |
摘要 |
PURPOSE: A grinding pad manufacturing device and a manufacturing method thereof are provided to produce grinding pads which vary in density by controlling the rotational force of a rotation cylinder. CONSTITUTION: A rotating cylinder(30) is rotatably installed in a frame. A mold sheet is installed in the inner circumference of the rotating cylinder in a cylindrical form and comprises a uniform patterned groove. A knife coater(50) is arranged inside the rotating cylinder and coats an abrasive resin on the surface of a mold sheet. A rotary unit(60) is installed in the frame and rotates the rotating cylinder. A controller is installed in the frame and controls the operation of the rotary unit. |
申请公布号 |
KR20100096718(A) |
申请公布日期 |
2010.09.02 |
申请号 |
KR20090015748 |
申请日期 |
2009.02.25 |
申请人 |
MICRO CHEMICAL KOREA CO., LTD. |
发明人 |
MOON, DEOG JU;CHUN, YUN JIN;BAE, JANG HO |
分类号 |
H01L21/304;B24B37/20;B24D3/28 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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