发明名称 POLISHING PAD MANUFACTURING DEVICE AND MANUFACTURING PROCESS USING IT
摘要 PURPOSE: A grinding pad manufacturing device and a manufacturing method thereof are provided to produce grinding pads which vary in density by controlling the rotational force of a rotation cylinder. CONSTITUTION: A rotating cylinder(30) is rotatably installed in a frame. A mold sheet is installed in the inner circumference of the rotating cylinder in a cylindrical form and comprises a uniform patterned groove. A knife coater(50) is arranged inside the rotating cylinder and coats an abrasive resin on the surface of a mold sheet. A rotary unit(60) is installed in the frame and rotates the rotating cylinder. A controller is installed in the frame and controls the operation of the rotary unit.
申请公布号 KR20100096718(A) 申请公布日期 2010.09.02
申请号 KR20090015748 申请日期 2009.02.25
申请人 MICRO CHEMICAL KOREA CO., LTD. 发明人 MOON, DEOG JU;CHUN, YUN JIN;BAE, JANG HO
分类号 H01L21/304;B24B37/20;B24D3/28 主分类号 H01L21/304
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