APPARATUS FOR COOLING AND DESICCATING FPD SUBSTRATE DURING THE ELECTRIC PROPERTY TEST

摘要

PURPOSE: A cooling and moisture-proofing device for an electric property test of a flat display substrate is provided to prevent the surface of a flat display substrate from retaining moisture and to enable an electrical property test to be conveniently made for the substrate at a low temperature. CONSTITUTION: A cooling and moisture-proofing device for an electric property test of a flat display substrate comprises a flow rate/oil pressure controller(110), a cold/hot air generator(120), a heater(130), a power supply(140), a cold air jetting nozzle(150), a moisture proofing unit(160) and a controller(170). The flow rate/oil pressure controller controls the flow rate and the oil pressure the compressed air incoming from outside. The cold /hot air generator divides the compressed air provided from the flow rate/oil pressure controller into the cold air and the hot air. The heater heats the cold air in order to control it to the temperature required for the electrical property test of the flat display substrate. The power supply supplies the heating energy to the heater. The cold air jetting nozzle jets the cold air to the surface of the flat display substrate and cools the surface of the substrate. The moisture proofing unit jets the hot air toward the cold air jetted from the cold air jetting nozzle to perform the moisture proofing operation of the substrate. The controller controls the operations of the power supply and the flow rate/oil pressure controller.