| 发明名称 |
Method for processing a MEMS/CMOS cantilever based memory storage device |
| 摘要 |
A Seek and Scan Probe (SSP) memory device is disclosed. The memory device includes a moving part having microelectromechanical (MEMS) structures fabricated on a first wafer and CMOS and memory medium components fabricating on a second wafer bonded to the first wafer. |
| 申请公布号 |
US7787352(B2) |
申请公布日期 |
2010.08.31 |
| 申请号 |
US20070005894 |
申请日期 |
2007.12.28 |
| 申请人 |
INTEL CORPORATION |
发明人 |
BAR-SADEH EYAL;CHOU TSUNG-KUAN;RAO VALLURI;MURALI KRISHNAMURTHY |
| 分类号 |
G11B9/00 |
主分类号 |
G11B9/00 |
| 代理机构 |
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代理人 |
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| 地址 |
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