发明名称 Buried bit line anti-fuse one-time-programmable nonvolatile memory
摘要 An anti-fuse one-time-programmable (OTP) nonvolatile memory cell has a P well substrate with two P.sup.− doped regions. Another N.sup.+ doped region, functioning as a bit line, is positioned adjacent and between the two P.sup.− doped regions on the substrate. An anti-fuse is defined over the N.sup.+ doped region. Two insulator regions are deposited over the two P.sup.− doped regions. An impurity doped polysilicon layer is defined over the two insulator regions and the anti-fuse. A polycide layer is defined over the impurity doped polysilicon layer. The polycide layer and the polysilicon layer function as a word line. A programmed region, i.e., a link, functioning as a diode, is formed on the anti-fuse after the anti-fuse OTP nonvolatile memory cell is programmed. The array structure of anti-fuse OTP nonvolatile memory cells and methods for programming, reading, and fabricating such a cell are also disclosed.
申请公布号 US7786000(B2) 申请公布日期 2010.08.31
申请号 US20090557262 申请日期 2009.09.10
申请人 MACRONIX INTERNATIONAL CO., LTD. 发明人 LUNG HSIANG-LAN
分类号 H01L21/425 主分类号 H01L21/425
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