| 摘要 |
The invention is directed to a method and apparatus for ion source positioning and adjustment. According to one embodiment, the invention relates to an apparatus for ion source positioning and adjustment. The apparatus comprises a bottom plate, a middle plate and a top plate, wherein the top plate is coupled to the middle plate by at least one adjustment member for causing the top plate to move in a first direction, wherein the at least one adjustment member positions the top plate in a predetermined position with respect to the middle plate; and the middle plate is coupled to the bottom plate by a worm gear assembly for causing the middle plate to move in a second direction with respect to the bottom plate.
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