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经营范围
发明名称
Chemical Vapor Deposition Apparatus
摘要
申请公布号
KR100978567(B1)
申请公布日期
2010.08.27
申请号
KR20080021123
申请日期
2008.03.06
申请人
发明人
分类号
C23C16/46;C23C16/00
主分类号
C23C16/46
代理机构
代理人
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地址
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