CONDENSATION REACTION PRODUCT FOR FILLING POLYSILOXANE-BASED TRENCH AND METHOD FOR MANUFACTURING TRENCH FILLING FILM

摘要

PROBLEM TO BE SOLVED: To provide a condensation reaction product for filling a trench having good storage stability of a solution suitable for using for filling the trench formed in a substrate with silicon oxide and high filling performance, permitting the formation of a thick film, and having good crack resistance, and provide a method for manufacturing a trench filling film. SOLUTION: A condensation reaction product for filling a trench contains: a condensation reaction product of polysiloxane compound and silica particles; and a mixed solvent comprising an organic solvent (A) having a vapor pressure of 530 Pa or above at 20°C and a boiling point of 80°C or above and below 130°C and an organic solvent (B) having a vapor pressure of below 530 Pa at 20°C and a boiling point of 130°C or above and 200°C or below; or an organic solvent (C) having a vapor pressure of 530 Pa or above at 20°C and a boiling point of 130°C or above and 200°C or below. COPYRIGHT: (C)2010,JPO&INPIT