| 摘要 |
A pressure sensor element includes: a package, a first diaphragm provided on a first surface of the package, a second diaphragm provided on a second surface of the package, and a pressure sensing element disposed in the package, the pressure sensing element including: a first base formed at one end in a longitudinal direction of the pressure sensing element, a second base formed at the other end in the longitudinal direction, and a resonating portion formed between the first base and the second base. In the element, the first and second surfaces are opposed to each other. The pressure sensor element is disposed such that the longitudinal direction is orthogonal to a displacement direction of each of the first and second diaphragms. The first base is connected to the first diaphragm while the second base is connected to the second diaphragm.
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