| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoresistive element type acceleration sensor which is stable electrically and mechanically and suitable for being made compact. <P>SOLUTION: The piezoresistive element type triaxial acceleration sensor including as components: a frame part; a flexible part; a spindle part held by the frame part through the flexible part; metal wiring for connecting a piezoresistive element disposed at the flexible part to a chip terminal disposed at the frame part; and a heavily doped diffusion layer, has acceleration sensors each having a bridge circuit composed of the piezoresistive element, the metal wiring and the high-concentration diffusion layer for respective three axes perpendicularly intersecting with another, wherein shield wiring is arranged on the piezoresistive element through a second insulating film, such that the shield wiring makes up a portion of the bridge circuit as a part of the metal wiring. <P>COPYRIGHT: (C)2010,JPO&INPIT |
