| 摘要 |
PROBLEM TO BE SOLVED: To improve the crystal orientation intensity distribution of a MgO protective film. SOLUTION: When a MgO film is deposited while conveying a substrate 10 with leading one ridge thereof, the (111) crystal orientation intensity of two ridges (both ridges) orthogonal to the leader of the substrate 10 is lower than that of the center part between both ridges. When a heater 38 for annealing is divided into a plurality of small heaters 38a, and heated so that both side ridges of the substrate 10 are hotter than the center part, the (111) crystal orientation intensity of the two ridges becomes higher, and the in-plane distribution of the (111) crystal orientation intensity is enhanced. COPYRIGHT: (C)2010,JPO&INPIT
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