发明名称 |
EDGE FILM REMOVAL PROCESS FOR THIN FILM SOLAR CELL APPLICATIONS |
摘要 |
The present invention provides a method and apparatus for edge film stack removal process for fabricating photovoltaic devices. In one embodiment, a method for manufacturing solar cell devices on a substrate includes providing a substrate into a chemical vapor deposition chamber, contacting a shadow frame disposed in the deposition chamber to a periphery region of the substrate, depositing a silicon-containing layer on the substrate through an aperture defined by the shadow frame, transferring the substrate to a physical vapor deposition chamber, depositing a transparent conductive layer on the silicon-containing layer, transferring the substrate to a laser edge removal tool, and laser scribing the layers formed on the periphery region of the substrate. |
申请公布号 |
WO2010080358(A3) |
申请公布日期 |
2010.08.26 |
申请号 |
WO2009US67878 |
申请日期 |
2009.12.14 |
申请人 |
APPLIED MATERIALS, INC.;SU, TZAY-FA;MORISHIGE, DAVID;MARTIN, TODD;MAHAJAN, UDAY |
发明人 |
SU, TZAY-FA;MORISHIGE, DAVID;MARTIN, TODD;MAHAJAN, UDAY |
分类号 |
H01L31/042;H01L21/205 |
主分类号 |
H01L31/042 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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