发明名称 |
Plate-shaped workpiece processing i.e. sharpening, method for forming ring-shaped reinforcing section in periphery region of workpiece, involves sharpening rear side of workpiece in circular recess and center region, respectively |
摘要 |
<p>The method involves holding a plate-shaped workpiece at a surface of a holder (6). A surface of a polishing disk (4b) is arranged relative to a rear side of the workpiece held at the surface of the holder. An outer peripheral edge of the surface of the polishing disk runs along a periphery of a circular recess and a center point of the workpiece. The rear side of the workpiece is sharpened in the circular recess and a center region corresponding to a region of the workpiece, respectively, for forming two cutting lines (23, 21) in curved shape. An independent claim is also included for a device for processing a plate-shaped workpiece.</p> |
申请公布号 |
DE102010008975(A1) |
申请公布日期 |
2010.08.26 |
申请号 |
DE20101008975 |
申请日期 |
2010.02.24 |
申请人 |
DISCO CORP. |
发明人 |
YOSHIDA, SHINJI;SUZUKI, YOSHIKAZU |
分类号 |
H01L21/304;B24B7/16 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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