发明名称 Plate-shaped workpiece processing i.e. sharpening, method for forming ring-shaped reinforcing section in periphery region of workpiece, involves sharpening rear side of workpiece in circular recess and center region, respectively
摘要 <p>The method involves holding a plate-shaped workpiece at a surface of a holder (6). A surface of a polishing disk (4b) is arranged relative to a rear side of the workpiece held at the surface of the holder. An outer peripheral edge of the surface of the polishing disk runs along a periphery of a circular recess and a center point of the workpiece. The rear side of the workpiece is sharpened in the circular recess and a center region corresponding to a region of the workpiece, respectively, for forming two cutting lines (23, 21) in curved shape. An independent claim is also included for a device for processing a plate-shaped workpiece.</p>
申请公布号 DE102010008975(A1) 申请公布日期 2010.08.26
申请号 DE20101008975 申请日期 2010.02.24
申请人 DISCO CORP. 发明人 YOSHIDA, SHINJI;SUZUKI, YOSHIKAZU
分类号 H01L21/304;B24B7/16 主分类号 H01L21/304
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