| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro movable element suitable for suppressing rotational displacement regarding a movable part performing translational displacement motion at driving, and an optical interferometer including such a micro movable element. SOLUTION: The micro movable element X1 is provided with the movable part 10; a fixed part 20; and connection parts 31-34. The movable part 10 has a pair of electrode parts 12, 13. The fixed part 20 has a pair of electrode parts 22, 23 for generating drive force of translational displacement of the movable part 10 in a direction crossing in a separation direction of the electrode parts 12, 13 in cooperation with the electrode parts 12, 13. Each of the plurality of connection parts 31-34 is connected to the movable part 10 and is connected to the fixed part 20. The electrode parts 12, 13 are positioned between connection parts P1, P3 in a separation direction of the connection part P1 where the connection part 31 and the movable part 10 are connected and the connection part P3 where the connection part 33 and the movable part 10 are connected. COPYRIGHT: (C)2010,JPO&INPIT
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