| 摘要 |
PROBLEM TO BE SOLVED: To provide a testing apparatus and a testing method of semiconductor integrated circuit for achieving effective heating of a probe card and reduction in cost of electric characteristic test of a semiconductor integrated circuit. SOLUTION: The testing apparatus includes a test head 11 and a probe card holder 16 detachably holding a probe card 100 including a probe 18 in contact with a semiconductor integrated circuit. Moreover, the testing apparatus further includes a heater 14 for heating the probe card 18 and a heater holding part 15 fixed to the probe card holding part 16 to hold the heater 14. The heater 14 is arranged to be in contact with the probe card 100, when the probe card 100 is held with the probe card holding part 16. COPYRIGHT: (C)2010,JPO&INPIT |
