| 发明名称 |
MICRO-ELECTRO-MECHANICAL-SYSTEM DEVICE WITH GUARD RING AND METHOD FOR MAKING SAME |
| 摘要 |
The present invention discloses a MEMS device with guard ring, and a method for making the MEMS device. The MEMS device comprises a bond pad and a sidewall surrounding and connecting with the bond pad, characterized in that the sidewall forms a guard ring by an etch-resistive material.
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| 申请公布号 |
US2010213568(A1) |
申请公布日期 |
2010.08.26 |
| 申请号 |
US20090391613 |
申请日期 |
2009.02.24 |
| 申请人 |
PIXART IMAGING INCORPORATION, R.O.C. |
发明人 |
HSU HSIN HUI;LEE SHENG TA;WANG CHUAN WEI |
| 分类号 |
H01L23/58;H01L21/441 |
主分类号 |
H01L23/58 |
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