THE METHOD OF AUTO-REMOVING THE REMAINING SLURRY OF WIRE MOVING FROM THE MAIN SLICING CHAMFER TO THE BOBBIN CHAMBER FOR THE WIRE SAW SYSTEM

摘要

PURPOSE: In the wire saw system for the wafer sawing, the air injection type system for the slurry auto removal asking after use in the wire collected to the wire bobbin chamber controls the slurry infiltration to the bobbin chamber. The service life of the wire and wire guide roller is increased. CONSTITUTION: The main slicing chamber(9) in which cut is included is prepared. In the main slicing chamber, it is sprayed in the wire in which the slurry at high speed moves and the silicon cut is included. While the slurry asks, the used wire is collected to the bobbin chamber(10). In the bobbin chamber, the bobbin(8) of the used wire and bobbin(7) of the new wire are accepted. In the use wire around collected with the provided new wire, the protective brace of the cone morphology installs.