| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of correcting astigmatism of an electro-optical column in an electron emission microscopic spectral device. SOLUTION: This method includes a step of forming a reference structure (100B) on a surface of a testpiece containing a structure which is to be an imaging object, a step of imaging the reference structure by a microscopic spectral device by using secondary electrons and using inner shell level photo-electrons, and a step of removing an astigmatic defect coming out while imaging the reference structure by using the secondary electrons and inner shell level photo-electrons. The material of the reference structure is selected so that a contrast C between an average strength Ia of the material of the reference structure and an average strength Ib of the material of the testpiece may become as shown in a formula (1). COPYRIGHT: (C)2010,JPO&INPIT |
