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申请公布号
JP4532749(B2)
申请公布日期
2010.08.25
申请号
JP20000608109
申请日期
2000.02.29
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发明人
分类号
H01L21/677;F16K3/18;F16K51/02;H01L21/00
主分类号
H01L21/677
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