| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus for decomposing perfluoro compounds, in which the HF corrosion of a member of a cooling unit, which is used for cooling a high-temperature gas containing HF of high concentration, is alleviated and to provide a method for decomposing perfluoro compounds by using the apparatus for decomposing perfluoro compounds. <P>SOLUTION: The apparatus for decomposing perfluoro compounds is provided with: a decomposition unit for decomposing the perfluoro compounds in the gas to be treated; the cooling unit for wetly cooling the gas generated by decomposing the perfluoro compounds; and an acidic gas removal unit for removing an acidic gas which is generated by decomposing the perfluoro compounds and contains HF. A HF neutralizing agent is added to the cooling unit. <P>COPYRIGHT: (C)2010,JPO&INPIT |
