发明名称 Solution composition and method of forming thin film and method of manufacturing thin film transistor using the solution composition
摘要 Disclosed is a solution composition for forming a thin film transistor including a zinc-containing compound, an indium-containing compound, and a compound including at least one metal or metalloid selected from the group consisting of hafnium (Hf), magnesium (Mg), tantalum (Ta), cerium (Ce), lanthanum (La), silicon (Si), germanium (Ge), vanadium (V), niobium (Nb), and yttrium (Y). A method of forming a thin film by using the solution composition, and a method of manufacturing thin film transistor including the thin film are also disclosed.
申请公布号 US2010210069(A1) 申请公布日期 2010.08.19
申请号 US20100656682 申请日期 2010.02.12
申请人 SEON JONG-BAEK;LEE SANG-YOON;PARK JEONG-IL;RYU MYUNG-KWAN;PARK KYUNG-BAE 发明人 SEON JONG-BAEK;LEE SANG-YOON;PARK JEONG-IL;RYU MYUNG-KWAN;PARK KYUNG-BAE
分类号 H01L21/36;H01B1/02;H01B1/22 主分类号 H01L21/36
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