PLANAR POSITIONING DEVICE AND INSPECTION DEVICE EQUIPPED WITH SAME

摘要

A planar positioning device is equipped with a first actuator, which can be displaced in the direction of a first axis, a second actuator, which can be displace in the direction of a second axis orthogonal to the first axis, a first displacement magnifying mechanism, which magnifies the displacement of the first actuator in the direction of the first axis, a second displacement magnifying mechanism, which magnifies the displacement of the second actuator in the direction of the second axis, a stage, which is disposed within a plane parallel to the first axis and the second axis, a first drive and support mechanism, which supports the stage within the plane and transfers the magnified displacement in the direction of the first axis to the stage, a second drive and support mechanism, which supports the stage within the plane and transfers the magnified displacement in the direction of the second axis to the stage, and a stabilizing support mechanism, which is connected to the stage and supports the stage, and imparts tension to the stage in the direction of the first axis and the direction of the second axis.