| 摘要 |
PROBLEM TO BE SOLVED: To reduce wasted power of a fan in controlling cleanness and a room temperature of a clean room. SOLUTION: A sensible heat air-conditioner (21) includes a cooling coil (22) and the fan (23), and circulates the air between the sensible heat air-conditioner and the clean room. An air supply flow channel (25) connected to the sensible heat air-conditioner (21) is provided with a HEPA filter (26). A cold water circulation pipe is connected to the cooling coil (22), and a flow rate regulation valve (27) is arranged in a pipe at its inlet side. An opening of the flow rate regulation valve (27) is regulated so that a return temperature of the cold water from the cooling coil (22) becomes a prescribed value. The air volume of the fan (23) is controlled according to the opening of the flow rate regulation valve (27). COPYRIGHT: (C)2010,JPO&INPIT
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