发明名称 APPARATUS FOR PRODUCING SINGLE CRYSTAL
摘要 <P>PROBLEM TO BE SOLVED: To provide an apparatus for producing a single crystal, the apparatus of producing a heavy single crystal in a high yield with little loss in the quality while the production cost is reduced by extending an exchange cycle of a seed wire for pulling a single crystal in the apparatus for producing a single crystal. Ž<P>SOLUTION: The apparatus 12 for producing a single crystal functions, upon pulling a single crystal 16 by Czochralski method, to pull a seed crystal 15 held by a seed chuck 14 by use of a seed wire 13; wherein the lower end of the seed wire 13 is coupled with an upper end of a top wire 19 via a hooking tool, the lower end of the top wire 19 is coupled to the seed chuck 14, and the wires are coupled to position the seed wire 13 in a region where the temperature is not higher than 700°C during pulling the single crystal. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010180072(A) 申请公布日期 2010.08.19
申请号 JP20090022606 申请日期 2009.02.03
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 MORI TAKASHI;IWASAKI ATSUSHI;INOUE SHICHIO;ISHIBASHI MASANORI;ISHIMOTO HIROYUKI
分类号 C30B15/30 主分类号 C30B15/30
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