LITHOGRAPHY IMPRINTING SYSTEM,申请号JP20100063842-传众专利搜索

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发明名称	LITHOGRAPHY IMPRINTING SYSTEM
摘要	<P>PROBLEM TO BE SOLVED: To provide a lithography imprinting system wherein channels or holes in the template holding the nano-imprint mold are used. Ž<P>SOLUTION: There are provided a method and a system to create and maintain a desired environment in the vicinity of a nano-imprint lithography template by creation of a partial vacuum using channels or holes in the template holding the nano-imprint mold. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号	JP2010179655(A)	申请公布日期	2010.08.19
申请号	JP20100063842	申请日期	2010.03.19
申请人	MOLECULAR IMPRINTS INC	发明人	CHERALA ANSHUMAN;LAD PANKAJ B;MCMACKIN IAN M;CHOI BYUNG-JIN
分类号	B29C59/02;H01L21/027	主分类号	B29C59/02
代理机构		代理人
主权项
地址

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