| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that, when a panel is transferred with a suction force on a transfer side, a stress is applied to the panel to be cracked or bent, or a mark of a suction pad is left, on the other hand, when the suction force is weak, displacement occurs at the transfer, the panel is separated and rises from the suction part due to warpage of the panel. SOLUTION: When transferring the display panel substrate, a weak mode is set to lower the suction force, to prevent a stress from being applied on the panel or the panel from being separated. A stable weak suction mode can be easily created by opening the suction system using an opening valve. Furthermore, the time for a weak suction pressure level can be controlled by means of opening time of the opening valve, thereby facilitating the control even in a higher-speed operation. COPYRIGHT: (C)2010,JPO&INPIT |
