| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dummy substrate suitable for a pre-sputtering treatment. Ž<P>SOLUTION: The dummy substrate 10 for the pre-sputtering treatment is made of a metallic substrate, and has recessed parts 14 or convex parts 12 on the surface thereof. The dummy substrate 10 is made of a metallic substrate so that it is less vulnerable to breaking compared to glass substrates, even when exposed to a film stress of a thin film 80 formed by the pre-sputtering treatment. The dummy substrate 10 has recessed parts 14 or convex parts 12 formed on its surface, which prevents peeling of the thin film 80 deposited on its surface. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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