发明名称 HYDROSTATIC SLIDER
摘要 A static pressure slider 1 includes a stationary member 2, a movable member 3, and a measuring means for measuring an actual distance between the stationary member 2 and the movable member 3. Preferably, the measuring means includes conductor layers 21-24, 31A-34A respectively formed on the stationary member 2 and the movable member 3. The measuring means may serve to measure a capacitance between guiding surfaces 25-28 and surfaces facing thereto.
申请公布号 KR100976994(B1) 申请公布日期 2010.08.19
申请号 KR20087016955 申请日期 2006.12.15
申请人 发明人
分类号 F16C32/06;F16C29/02 主分类号 F16C32/06
代理机构 代理人
主权项
地址