| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate storage container capable of suppressing scale-up of a container body and damage of a substrate even if the warpage of the substrate is large, and taking out the substrate by preventing positional deviation of the substrate. SOLUTION: In the substrate storage container, the container body 10 for storing the semiconductor wafer 1 is formed in a front open box, a lower supporting block 16 for vertically supporting the lower part of a circumferential edge 2 of the semiconductor wafer 1 is provided on the inner bottom surface of the container body, an upper retainer 21 for vertically supporting the upper part of the circumferential edge 2 of the semiconductor wafer 1 is juxtaposed so as to be elastic in a vertical direction in the inner surface of a top plate 22 of the container body 10, and a rear supporting block 23 for vertically supporting the rear of the upper part of the circumferential edge 2 of the semiconductor wafer 1 is provided on the inner surface of a back wall 27 of the container body 10. Since the semiconductor wafer 1 is supported upright, even if the semiconductor wafer 1 isϕ450 mm type having a large warpage amount, the warpage of the semiconductor wafer 1 is prevented and the container body 10 can be prevented from scaling up to efficiently utilize a space. COPYRIGHT: (C)2010,JPO&INPIT |
