发明名称 METHOD AND APPARATUS FOR MANUFACTURING MAGNETIC RECORDING MEDIUM
摘要 The present invention provides a method for manufacturing a magnetic recording medium by mounting a substrate for film formation on a carrier, sequentially transporting said substrate into a plurality of connected chambers, and forming at least a magnetic film and a carbon protective film on said substrate for film formation within said chambers, wherein said method comprises a step of forming a metal film on a carrier surface, which is performed following a step of removing a magnetic recording medium from said carrier following film formation, but prior to a step of mounting a substrate for film formation on said carrier.
申请公布号 US2010206717(A1) 申请公布日期 2010.08.19
申请号 US20080668366 申请日期 2008.07.09
申请人 SHOWA DENKO K.K. 发明人 KUROKAWA GOHEI
分类号 C23C14/35;C23C14/22 主分类号 C23C14/35
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