| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of obtaining an image with a superior contrast even if a primary beam current is small and efficiency of a secondary electron emission is small. SOLUTION: In the scanning electron microscope in which at least one channel detecting signal is amplified and converted into digital data and the detected signal converted into the digital data is input into a frame integrator 8 for reducing noises decorrelated between frames, and its output is displayed on an observation image display unit 13, a multiplication means is provided for multiplying a certain factor with the output of the frame integrator 8 and the output of the multiplication means is displayed on the observation image display unit 13. COPYRIGHT: (C)2010,JPO&INPIT
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