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发明名称
EUV MASK AND METHOD FOR REPAIRING AN EUV MASK
摘要
申请公布号
KR100977095(B1)
申请公布日期
2010.08.19
申请号
KR20080058644
申请日期
2008.06.20
申请人
发明人
分类号
H01L21/027;G03F1/00
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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