| 摘要 |
PROBLEM TO BE SOLVED: To provide an automatic incident axis aligning method for a cold cathode electron gun by which the incident axis of an electron beam with respect to an anode electrode A2 is optimized automatically. SOLUTION: A transmission electron microscope includes a group of condenser lenses, a group of objective lenses, a group of intermediate lenses, a group of projection lenses, one or more objective diaphragms, the cold cathode electron gun which make an emitter emit an electron beam when an electric field is applied to a first anode electrode A1 and the second anode electrode A2 of the electron gun, and a motor which adjusts the mechanical position relative to the anode electrode A2 of the electron gun. The motor is driven to make the electron gun scan mechanically and the incident axis of an electron beam with respect to an opening of the annular anode electrode A2 is adjusted, so that the optimum mechanical position of the electron gun at a point that the amount of a current passing through the opening of the anode electrode A2 reaches the maximum is obtained automatically. COPYRIGHT: (C)2010,JPO&INPIT |
