ARRANGEMENT FOR SPATIALLY RESOLVED DETERMINATION OF THE SPECIFIC ELECTRICAL RESISTANCE AND/OR THE SPECIFIC ELECTRICAL CONDUCTIVITY OF SAMPLES

摘要

Arrangement for spatially resolved determination of the specific electrical resistance and/or the specific electrical conductivity of a sample at different positions, with which a plurality of detectors for spatially resolved spectral analysis of electromagnetic radiation within a wavelength interval is configured. A surface of the sample is irradiated with homogeneous intensity. The detected spatially-resolved and wavelength-resolved measurement signals of the detectors, within a wavelength interval, are compared for each detected position with a wavelength-resolved function, wherein the wavelength-dependent function is produced by calculating the propagation of electromagnetic radiation in multi-layer systems using an optical model for physically describing the tested sample, while considering the wavelength-dependent curves of the linear optical refractive indices (n) and absorption coefficients (k) of all materials and/or substances forming the sample. By a change in the parameters of the physical function, same are brought iteratively to sufficient congruence with a calibration curve in order to determine the specific electrical resistance and/or the specific electrical conductivity at different positions in a spatially resolved manner.