| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for regenerating a carbon heater, which has been used for preheating a silicon core wire in a silicon production process, simply in a short period of time without using special devices such as a reactor requiring much production cost. SOLUTION: As for a carbon heater 9 fitted into a reactor, in which a silicon core wire for precipitating silicon generated by the reaction of gaseous silane and gaseous hydrogen is erected, and heating the silicon core wire to a temperature, that the silicon core wire can be energized, after the completion of the precipitation of silicon, the carbon heater 9 is detached from the reactor, the detached carbon heater 9 is subjected to induction heating, and the silicon precipitated in the carbon heater 9 is melted-off and removed. COPYRIGHT: (C)2010,JPO&INPIT |
