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发明名称
摘要
申请公布号
JP4525629(B2)
申请公布日期
2010.08.18
申请号
JP20060123695
申请日期
2006.04.27
申请人
发明人
分类号
H01L21/822;H01L21/8234;H01L27/04;H01L27/06
主分类号
H01L21/822
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