发明名称 |
Method for correcting astigmatism using electron-emitting spectromicroscopic imaging |
摘要 |
<p>The method involves imaging reference structures with secondary electrons and with care level photoelectrons by a spectromicroscope, and eliminating astigmatism defects appearing during imaging of the reference structures. A material of the reference structures is chosen such that a contrast between average intensity of the material of the reference structure and average intensity of a material of a sample is calculated by specific equation during core level photoelectron imaging.</p> |
申请公布号 |
EP2219203(A1) |
申请公布日期 |
2010.08.18 |
申请号 |
EP20100152926 |
申请日期 |
2010.02.08 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES |
发明人 |
RENAULT, OLIVIER;LAVAYSSIERE, MAYLIS;MARIOLLE, DENIS |
分类号 |
H01J37/153;H01J37/26 |
主分类号 |
H01J37/153 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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