A FLUID SUPPLY SYSTEM, A LITHOGRAPHIC APPARATUS, A METHOD OF VARYING FLUID FLOW RATE AND A DEVICE MANUFACTURING METHOD.,申请号NL20102004162-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	A FLUID SUPPLY SYSTEM, A LITHOGRAPHIC APPARATUS, A METHOD OF VARYING FLUID FLOW RATE AND A DEVICE MANUFACTURING METHOD.
摘要
申请公布号	NL2004162(A)	申请公布日期	2010.08.18
申请号	NL20102004162	申请日期	2010.01.28
申请人	ASML NETHERLANDS B.V.,	发明人	KRAMER, PIETER;KUIJPER, ANTHONIE;MARTENS, ARJAN
分类号	G03F7/20	主分类号	G03F7/20
代理机构		代理人
主权项
地址

您可能感兴趣的专利

SEAL HAVING VARIABLE ELASTIC MODULUS

MACHINE INTERFACE, DRIVE AND VERTICAL GRINDING MILL

METHOD AND SYSTEM FOR DYNAMICALLY PROVIDING INFORMATION VIA CHARGING STATION

WIRELESS LOGIN-BASED REMOTE CONTROL METHOD AND APPARATUS

TRAVEL ROUTE GUIDE DEVICE, TRAVEL ROUTE GUIDE SYSTEM, TRAVEL ROUTE GUIDE METHOD AND PROGRAM

POWER CONVERTER CONFIGURED FOR LIMITING SWITCHING OVERVOLTAGE

RESOURCE SELECTION IN DEVICE TO DEVICE COMMUNICATION

LID-BODY OPENING AND CLOSING MECHANISM AND ELECTRONIC-DEVICE STORAGE CASE

WIRELESS COMMUNICATION SYSTEM, BASE STATION DEVICE, WIRELESS TERMINAL, AND COMMUNICATION CONTROL METHOD

NEUTRON SCINTILLATOR, NEUTRON DETECTOR AND METHOD FOR MANUFACTURING NEUTRON SCINTILLATOR

METHOD AND APPARATUS FOR RECONFIGURING A BEARER

FLAVOR COMPOSITION AND EDIBLE COMPOSITIONS CONTAINING SAME

MEASUREMENT MANAGEMENT IN SMALL-CELL SYSTEMS

PROTECTIVE COVER FOR A WIRELESS DEVICE

ANTIBODY-SN-38 IMMUNOCONJUGATES WITH A CL2A LINKER

ELECTRONIC COMPONENT

COMPUTER-BASED SYSTEM AND METHOD FOR FLEXIBLE PROJECT MANAGEMENT

METHOD FOR STRUCTURING A SURFACE OF A MACHINE ELEMENT

METHOD AND DEVICE FOR ELIMINATING INTERSYSTEM NEIGHBORING FREQUENCY INTERFERENCE

SCANNING LASER PROXIMITY DETECTION