SURFACE MEASUREMENT APPARATUS AND METHOD OF SURFACE MEASUREMENT

摘要

PURPOSE: An apparatus for measuring a surface and a method for measuring the surface using the same are provided to maximize a detection ratio by detecting foreign materials on the surface regardless of the optical axis of beam. CONSTITUTION: A stage moves an object(102) in a straight direction and in a rotating direction. Optical source radiates beam toward the object and relatively rotates with respect to the stage. A detector for reflected beam(103) detects the reflected beam from the object. The detector for the reflected beam includes a first detector and a second detector. A beam splitter splits the reflected beam toward the detector for the reflected beam and supplies the split beam to the first detector and the second detector.