发明名称 SUBSTRATE FOR SEMICONDUCTOR DEVICE AND METHOD FOR ITS MANUFACTURE
摘要 A metal and oxygen material such as a transparent electrically conductive oxide material is electro deposited onto a substrate in a solution deposition process. Process parameters are controlled so as to result in the deposition of a high quality layer of material which is suitable for use in a back reflector structure of a high efficiency photovoltaic device. The deposition may be carried out in conjunction with a masking member which operates to restrict the deposition of the metal and oxygen material to specific portions of the substrate. In particular instances the deposition may be implemented in a continuous, roll-to-roll process. Further disclosed are semiconductor devices and components of semiconductor devices made by the present process, as well as apparatus for carrying out the process.
申请公布号 US2010200067(A1) 申请公布日期 2010.08.12
申请号 US20090369016 申请日期 2009.02.11
申请人 UNITED SOLAR OVONIC LLC 发明人 LIU SHENGZHONG;ZHOU YANHUA;HU CHAOLAN;BANERJEE ARINDAM;YANG JEFFREY;GUHA SUBHENDU
分类号 H01L31/0224;C25D1/06 主分类号 H01L31/0224
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