| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a deposition film, by which a high-quality deposition film can be formed and image defects can be decreased, in the process of forming a deposition film that can be used for an electrophotographic photoreceptor. Ž<P>SOLUTION: A method for manufacturing an electrophotographic photoreceptor includes: setting up a conductive substrate inside a reaction chamber that can be decompressed; decomposing a raw material gas supplied in the reaction chamber by high-frequency electric power; and forming a non-single crystalline film whose parent body is silicon on the conductive substrate. The first layer in contact with the surface of the conductive substrate includes three regions where the supply ratio of the raw material gas and the supply amount are constant but application conditions of high-frequency power are different from one another; the three regions are, from the conductive substrate side, a first-half region, a change region and a second-half region; and the high-frequency power supplied to the first-half region is lower than the high-frequency power supplied to the second-half region. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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