| 发明名称 |
MICROMECHANICAL DEVICE HAVING A DRIVE FRAME |
| 摘要 |
A micromechanical device includes at least one drive frame and at least one vibrator, the vibrator being situated in a region surrounded by the drive frame; the vibrator being mechanically coupled to the drive frame. The drive frame is able to be excited to generate a flexural vibration.
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| 申请公布号 |
US2010199762(A1) |
申请公布日期 |
2010.08.12 |
| 申请号 |
US20080452546 |
申请日期 |
2008.09.26 |
| 申请人 |
MEISEL DANIEL CHRISTOPH;HAUER JOERG |
发明人 |
MEISEL DANIEL CHRISTOPH;HAUER JOERG |
| 分类号 |
G01C19/56 |
主分类号 |
G01C19/56 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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